|
Fig.: Sensor with base
|
Features:
-
Thermal
conductivity sensor for gases in
silicon
micromechanics
-
Minimal
power consumption, low
temperatures
-
Very
small dimensions, short time constants
-
Measurement of very small gas volumes
-
Gas exchange by diffusion, independent of flow
-
Integrated temperature compensation resistors
-
TO8-style base, shock proof
|
|
